Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Leigh F. Sharrock, Chris Aitken | 2021-06-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Leigh F. Sharrock, Chris Aitken | 2021-06-01 |