Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11088004 | Automatic wafer centering method and apparatus | Alexander Krupyshev | 2021-08-10 |
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Sean E. PLAISTED, Chris Aitken | 2021-06-01 |