Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Sean E. PLAISTED, Leigh F. Sharrock | 2021-06-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11020852 | Substrate transport apparatus with independent accessory feedthrough | Sean E. PLAISTED, Leigh F. Sharrock | 2021-06-01 |