Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143975 | Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off | Andrey Nikipelov, Vadim Yevgenyevich Banine, Joost André KLUGKIST, Maxim Aleksandrovich Nasalevich, Roland Johannes Wilhelmus Stas | 2021-10-12 |