Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150550 | Reflective mask blank and reflective mask | Hiroshi Hanekawa, Tsuyoshi Kakuta, Yoichi SERA | 2021-10-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150550 | Reflective mask blank and reflective mask | Hiroshi Hanekawa, Tsuyoshi Kakuta, Yoichi SERA | 2021-10-19 |