Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150550 | Reflective mask blank and reflective mask | Tsuyoshi Kakuta, Yoichi SERA, Sadatatsu Ikeda | 2021-10-19 |
| 11036127 | Reflective mask blank and reflective mask | Hirotomo Kawahara, Toshiyuki Uno | 2021-06-15 |