Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150550 | Reflective mask blank and reflective mask | Hiroshi Hanekawa, Yoichi SERA, Sadatatsu Ikeda | 2021-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150550 | Reflective mask blank and reflective mask | Hiroshi Hanekawa, Yoichi SERA, Sadatatsu Ikeda | 2021-10-19 |