Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036127 | Reflective mask blank and reflective mask | Hirotomo Kawahara, Hiroshi Hanekawa | 2021-06-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036127 | Reflective mask blank and reflective mask | Hirotomo Kawahara, Hiroshi Hanekawa | 2021-06-15 |