Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149352 | Method and apparatus for depositing atomic layers on a substrate | Raymond Jacobus Wilhelmus Knaapen, Dennis Van Den Berg, Matijs C. van den Boer, Freddy Roozeboom | 2021-10-19 |
| 10969695 | Fluid handling structure and lithographic apparatus | Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Johannes Cornelis Paulus Melman, Han Henricus Aldegonda Lempens, Miao Yu +4 more | 2021-04-06 |
| 10916453 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more | 2021-02-09 |