Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029607 | Fluid handling structure for lithographic apparatus | Cornelius Maria Rops, Theodorus Wilhelmus Polet, Floor Lodewijk Keukens, Gheorghe Tanasa, Rogier Hendrikus Magdalena Cortie +8 more | 2021-06-08 |
| 10916453 | Lithographic apparatus, method of transferring a substrate and device manufacturing method | Aart Adrianus Van Beuzekom, Jozef Augustinus Maria Alberti, Hubert Marie Segers, Ronald Van Der Ham, Francis Fahrni +5 more | 2021-02-09 |