Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923309 | GeH4/Ar plasma chemistry for ion implant productivity enhancement | Bon-Woong Koo, Ajdin Sarajlic, Ronald F. Johnson, Nunzio V. Carbone, Mervyn Deegan | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923309 | GeH4/Ar plasma chemistry for ion implant productivity enhancement | Bon-Woong Koo, Ajdin Sarajlic, Ronald F. Johnson, Nunzio V. Carbone, Mervyn Deegan | 2021-02-16 |