Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152192 | Plasma processing apparatus and method | Norihiko Ikeda, Tooru Aramaki, Yasuhiro Nishimori | 2021-10-19 |
| 11094512 | Plasma processing apparatus and plasma processing method | Kazuya Yamada, Koichi Yamamoto, Norihiko Ikeda, Isao Mori | 2021-08-17 |
| 11081320 | Plasma processing apparatus, plasma processing method, and ECR height monitor | Norihiko Ikeda, Kazuya Yamada | 2021-08-03 |
| 11004658 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi | 2021-05-11 |