Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094512 | Plasma processing apparatus and plasma processing method | Koichi Yamamoto, Naoki Yasui, Norihiko Ikeda, Isao Mori | 2021-08-17 |
| 11081320 | Plasma processing apparatus, plasma processing method, and ECR height monitor | Norihiko Ikeda, Naoki Yasui | 2021-08-03 |