MS

Mikio Suzuki

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #327,657 of 548,734Top 60%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10886170 Method of forming tungsten film Koji Maekawa, Takashi Sameshima, Shintaro Aoyama, Susumu Arima, Atsushi Matsumoto +1 more 2021-01-05