Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189499 | Atomic layer etch (ALE) of tungsten or other metal layers | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Aelan Mosden | 2021-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189499 | Atomic layer etch (ALE) of tungsten or other metal layers | Yu-Hao Tsai, Du Zhang, Mingmei Wang, Aelan Mosden | 2021-11-30 |