Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094509 | Plasma processing apparatus | Makoto Satake, Tadayoshi Kawaguchi, Takamasa Ichino | 2021-08-17 |
| 10930476 | Plasma processing device | Tooru Aramaki, Masaru Izawa | 2021-02-23 |