Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11135698 | Processing apparatus, processing method, and storage medium | Kenji Nakamizo, Yuichi Douki | 2021-10-05 |
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Tomiyasu Maezono, Sadamichi MORI, Kouji Takuma, Chikara Nobukuni, Shinji Sugahara +1 more | 2021-06-22 |