Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062930 | Substrate processing device and substrate conveying method | — | 2021-07-13 |
| 11043399 | Substrate processing apparatus and operation method of substrate processing apparatus | Tomiyasu Maezono, Sadamichi MORI, Chikara Nobukuni, Keigo Satake, Shinji Sugahara +1 more | 2021-06-22 |