Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11208725 | Substrate processing apparatus | Kouichi Mizunaga, Masami Akimoto, Satoshi Morita | 2021-12-28 |
| 11097907 | Substrate transfer device and substrate transfer method | — | 2021-08-24 |