Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11111583 | Substrate carrier system utilizing electrostatic chucking to accommodate substrate size heterogeneity | Sriskantharajah Thirunavukarasu, Jen Sern Lew, Mingwei Zhu | 2021-09-07 |