Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049716 | Gap fill using carbon-based films | Wei Tang, Jason D. Park, Bart J. van Schravendijk, Shu Tsai Wang | 2021-06-29 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Gary Lind, Michal Danek, Ronald Powell, Michael Rumer | 2021-01-19 |