Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049693 | Systems and methods for achieving peak ion energy enhancement with a low angular spread | Ying Wu, Alex Paterson | 2021-06-29 |
| 11011351 | Monoenergetic ion generation for controlled etch | Alexander Paterson, Ying Wu | 2021-05-18 |