Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akito Hatano, Motoyuki Shimai, Toyohide Hayashi | 2021-07-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Yuta Nishimura, Akito Hatano, Motoyuki Shimai, Toyohide Hayashi | 2021-07-27 |