Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066295 | Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis | Philip Kaupmann, Stefan Pinter, Helmut Grutzeck, Joerg Muchow | 2021-07-20 |