Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11130672 | Micromechanical device and corresponding production method | Johannes Baader, Nicolas Schorr, Rainer Straub, Tina Steigert | 2021-09-28 |
| 11124412 | Manufacturing method for a micromechanical window structure and corresponding micromechanical window structure | Joerg Muchow, Rainer Straub | 2021-09-21 |
| 11066295 | Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis | Philip Kaupmann, Helmut Grutzeck, Jochen Franz, Joerg Muchow | 2021-07-20 |
| 10996461 | Protective wafer including inclined optical windows and device | — | 2021-05-04 |