Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066295 | Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis | Stefan Pinter, Helmut Grutzeck, Jochen Franz, Joerg Muchow | 2021-07-20 |
| 11061221 | Micromechanical component, method for manufacturing a micromechanical component, and method for exciting a movement of an adjustable part about a rotational axis | — | 2021-07-13 |