Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969036 | High flow multi-way piston valve for deposition systems | James Isaac Fortner, Robert Rash, Aaron Berke | 2021-04-06 |
| 10927475 | Controlling plating electrolyte concentration on an electrochemical plating apparatus | Zhian He, Shantinath Ghongadi, Quan Ma, Hyungjun Hur, Cian Sweeney +2 more | 2021-02-23 |