Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149234 | Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same | Mi Hyun Park, Jung-Min Oh, Young-Hoo Kim, Tae-Keun Kim, Ye Rim Yeon +3 more | 2021-10-19 |
| 11142694 | Etchant composition and method of fabricating semiconductor device | Jung-a Kim, Young-chan Kim, Hoon Han, Jin Uk Lee, Jung Hun Lim +1 more | 2021-10-12 |