Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11198815 | Etching composition and method for fabricating semiconductor device by using the same | Soo-Jin Kim, Hyo-Sun Lee, Jin-Hye Bae, Yong Jae Choi | 2021-12-14 |
| 11149200 | Composition for etching and method for manufacturing semiconductor device using same | Jin Uk Lee, Jae Wan Park | 2021-10-19 |
| 11142694 | Etchant composition and method of fabricating semiconductor device | Jung-a Kim, Young-chan Kim, Hyo-San Lee, Hoon Han, Jin Uk Lee +1 more | 2021-10-12 |
| 11028488 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Keonyoung Kim, Hyosan Lee +2 more | 2021-06-08 |
| 11008513 | Composition for etching | Jin Uk Lee, Jae Wan Park | 2021-05-18 |
| 10995269 | Etchant composition and method of fabricating integrated circuit device using the same | Jin Woo Lee, Hoon Han, Keon-Young Kim, Jin Uk Lee, Jae Wan Park | 2021-05-04 |