Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11028488 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Mihyun PARK, Jinwoo Lee, Keonyoung Kim, Hyosan Lee, Hoon Han +2 more | 2021-06-08 |