Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003068 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Tsutomu Shoki, Takahiro Onoue | 2021-05-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003068 | Reflective mask blank, reflective mask and method of manufacturing semiconductor device | Yohei IKEBE, Tsutomu Shoki, Takahiro Onoue | 2021-05-11 |