Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211226 | Pattern cross-sectional shape estimation system and program | Toshiyuki Yokosuka, Daisuke Bizen, Makoto Suzuki, Yusuke Abe, Kenji Yasui +2 more | 2021-12-28 |
| 11195694 | Charged particle beam system, method for determining range for automatically searching for focal point position in charged particle beam device, and non-transitory storage medium recording program for causing computer system to determine range for automatically searching for focal position in charged particle beam device | Kosuke Matsumoto, Takashi Nobuhara, Kenji Obara | 2021-12-07 |
| 11164720 | Scanning electron microscope and calculation method for three-dimensional structure depth | Kenji Yasui, Mayuka Osaki, Makoto Suzuki, Toshiyuki Yokosuka, Daisuke Bizen +1 more | 2021-11-02 |