Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156926 | Vacuum actuator containment for molecular contaminant and particle mitigation | Zefram Marks, Rudy F. Garcia, Joseph Walsh, Matthew Bernard McLaughlin Hoffman | 2021-10-26 |
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Francis Chilese, Rudy F. Garcia, Mohammed Tahmassebpur, Salam Harb | 2021-03-23 |