Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996125 | Pressure sensors and method for forming a MEMS pressure sensor | Markus Eckinger, Dirk Hammerschmidt, Bernhard Winkler | 2021-05-04 |
| 10899604 | Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package | Christian Geissler, Robert Gruenberger, Claus Waechter, Bernhard Winkler | 2021-01-26 |