Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137695 | Method of determining a height profile, a measurement system and a computer readable medium | Arend Johannes Donkerbroek, Jeroen COTTAAR, Thomas Theeuwes | 2021-10-05 |
| 11099489 | Method of measuring a parameter of a lithographic process, metrology apparatus | Hugo Augustinus Joseph Cramer, Hilko Dirk Bos, Armand Eugene Albert Koolen, Han-Kwang Nienhuys, Alessandro Polo +2 more | 2021-08-24 |