Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137695 | Method of determining a height profile, a measurement system and a computer readable medium | Arend Johannes Donkerbroek, Thomas Theeuwes, Erik Johan Koop | 2021-10-05 |
| 10915033 | Lithographic apparatus and device manufacturing method | Bram Van Hoof | 2021-02-09 |