Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183400 | Progressive heating of components of substrate processing systems using TCR element-based heaters | Ramesh Chandrasekharan | 2021-11-23 |
| 11056380 | Wafer positioning pedestal for semiconductor processing | Paul Konkola, Karl Leeser | 2021-07-06 |