Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11042096 | Alignment measurement system | Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more | 2021-06-22 |
| 11036128 | Membrane assembly | Derk Servatius Gertruda Brouns, Paul Janssen, Mohammad Reza KAMALI, Mária Péter, Willem Joan Van Der Zande +2 more | 2021-06-15 |
| 10983431 | Pellicle and pellicle assembly | Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more | 2021-04-20 |
| 10976196 | Sensor mark and a method of manufacturing a sensor mark | Joost André KLUGKIST, Vadim Yevgenyevich Banine, Johan Franciscus Maria Beckers, Madhusudhanan Jambunathan, Maxim Aleksandrovich Nasalevich +4 more | 2021-04-13 |
| 10908496 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2021-02-02 |