Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112773 | Systems for removing and replacing consumable parts from a semiconductor process module in situ | Alan J. Miller, John Daugherty, Alex Paterson | 2021-09-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112773 | Systems for removing and replacing consumable parts from a semiconductor process module in situ | Alan J. Miller, John Daugherty, Alex Paterson | 2021-09-07 |