Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11185815 | Plasma abatement of compounds containing heavy atoms | Michael S. Cox, Monique McIntosh, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2021-11-30 |
| 11110392 | Apparatus for treating exhaust gas in a processing system | Mehran Moalem, Daniel O. Clark | 2021-09-07 |
| 10920315 | Plasma foreline thermal reactor system | — | 2021-02-16 |