Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11110392 | Apparatus for treating exhaust gas in a processing system | Colin John Dickinson, Mehran Moalem | 2021-09-07 |
| 11049735 | Methods and apparatus for conserving electronic device manufacturing resources | Phil Chandler, Jay J. Jung | 2021-06-29 |