Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053581 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2021-07-06 |
| 10934216 | Rare-earth oxide based chamber material | Jennifer Y. Sun | 2021-03-02 |
| 10930526 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2021-02-23 |