Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Steffen Bieselt, Heiko Froehlich, Maik Stegemann, Mirko Vogt | 2021-08-03 |