Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Thoralf Kautzsch, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2021-08-03 |
| 10961116 | Micro-mechanical sensor and method for manufacturing a micro-electro-mechanical sensor | Dirk Meinhold, Erhard Landgraf | 2021-03-30 |