Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11078072 | Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process | Steffen Bieselt, Heiko Froehlich, Andre Roeth, Maik Stegemann, Mirko Vogt | 2021-08-03 |
| 11041757 | Tunable Fabry-Perot filter element, spectrometer device and method for manufacturing a tunable Fabry-Perot filter element | — | 2021-06-22 |
| 11015980 | Infrared radiation sensors and methods of manufacturing infrared radiation sensors | Vladislav Komenko, Heiko Froehlich, Andrey Kravchenko | 2021-05-25 |
| 10948513 | Electronic device having a first electrode formed on a movable suspended mass opposing a second electrode formed on a cover layer | — | 2021-03-16 |