Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211324 | Via contact patterning method to increase edge placement error margin | Mohit K. HARAN, Deepak S. Rao, Marvin Young Paik, Seungdo An, Debashish Basu +6 more | 2021-12-28 |