Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195713 | Methods of forming a silicon-insulator layer and semiconductor device having the same | Joachim Hirschler, Georg Ehrentraut, Christoffer Erbert, Klaus Goeschl, Markus Heinrici +6 more | 2021-12-07 |
| 11077525 | Method of processing a silicon carbide containing crystalline substrate, silicon carbide chip, and processing chamber | Markus Menath, Gudrun Stranzl | 2021-08-03 |
| 11063014 | Semiconductor devices including a metal silicide layer and methods for manufacturing thereof | Gudrun Stranzl | 2021-07-13 |