Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181818 | Lithography scanner | Emily Gallagher, Joern-Holger Franke, Ivan Pollentier, Marina Timmermans | 2021-11-23 |
| 11163229 | Induced stress for EUV pellicle tensioning | Marina Timmermans, Ivan Pollentier, Cedric Huyghebaert, Emily Gallagher | 2021-11-02 |