Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11163229 | Induced stress for EUV pellicle tensioning | Marina Mariano Juste, Marina Timmermans, Ivan Pollentier, Emily Gallagher | 2021-11-02 |
| 11092886 | Method for forming a pellicle | Marina Timmermans, Emily Gallagher, Ivan Pollentier, Hanns Christoph Adelmann, Jae Uk Lee | 2021-08-17 |