Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181818 | Lithography scanner | Emily Gallagher, Joern-Holger Franke, Marina Timmermans, Marina Mariano Juste | 2021-11-23 |
| 11163229 | Induced stress for EUV pellicle tensioning | Marina Mariano Juste, Marina Timmermans, Cedric Huyghebaert, Emily Gallagher | 2021-11-02 |
| 11092886 | Method for forming a pellicle | Marina Timmermans, Emily Gallagher, Hanns Christoph Adelmann, Cedric Huyghebaert, Jae Uk Lee | 2021-08-17 |